Plasma technologies

Technologies for deposition of multilayer and composite coatings in the combined arc and RF discharges have been developed. Application of high frequency allowed substantial reduction of the surface temperature and production of coatings with excellent adhesion on metals and dielectrics, including the inner surfaces of items.

The compact ozone generators using the dielectric barrier discharge were developed. On the basis of these ozone generators, the high-efficiency low-temperature sterilizers with ultrasonic cavitation were designed for medicine and industry.